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Spares from: ASM, |
| ASM | ||
| 02-105180D01 | THERMOCOUPLE PECVD 3 DUAL |
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| 03-1439 | Silicone gasket N2 |
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| 03-1749 | Graphite gasket |
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| 05000 50F5329 | Roller ans Shaft Assy |
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| 100112 | Manual valve FTM2F |
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| 11-0792 | O-Ring 72.64x3.53 Silicone 2-23, |
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| 11-0853 | Filter Gas Line |
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| 120117 | Valve F RHP Quarter T |
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| 120717 | Valve F RHP Quarter T |
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| 122 403 150.11 | Quartz Finger |
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| 122 425 240.11 | Disc |
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| 122 425 260.11 | Yoke |
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| 122 425 280.11 | Pin (Pivot) |
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| 12246001000 | Main Control Panel TL Assy part no. 200059-01 |
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| 122460030 | Maintainance Panel. Manual control transport |
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| 123 063 050 | Power Pack Assy |
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| 123061240 | Assembly, thermocouple 13 |
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| 2 014 564-01 | Transformer |
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| 200 654 501 | Sensor Finger Detector |
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| 2017547-07 | Thermocouple, PECVD 1 & 2 |
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| 204 1561.02 | Twisted cable ratio |
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| 210112 | Pneumatic Valve |
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| 210117 | Pneumatic Valve |
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| 210217 | Pneumatic Valve F AN |
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| 230 119 DD 000 | Pneumatic Valve F HF |
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| 27301001000 | Operator Panel |
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| 273060070 | Keyboard (+switch) |
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| 300111 | Pneumatic Valve F MO |
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| 300112 | VALVE PECVD PNEUMATIC NC |
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| 300117 | Pneumatic Valve F RH |
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| 300167 | Pneumatic Valve PSV (Qualiflow) |
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| 300217 | Pneumatic valve |
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| 300517 | Pneumatic valve F RH |
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| 300717 | Pneumatic Valve F RH |
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| 3080034 | Eurotherm 810 |
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| 3082783 | Mass Flow Controller AFC-260 500sccm N2/O2 |
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| 31439 | Silicone gasket N2 |
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| 31749 | Graphite gasket |
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| 32125036000 | Cable assy keyboard |
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| 32125066000 | Cable assy satc/cas |
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| 321492100 | Power Supply Cable |
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| 340107460.1 | ROD TIE BOAT PECVD |
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| 340107480.1 | SLIDE WHEELED BOAT PECVD |
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| 402-714 | VALVE PECVD SHUT-OFF MSV |
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| 4080136 | Square Seal Silicone |
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| 4080137 | Square Seal Viton |
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| 445517 | Variable valve |
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| 4764224 | Cable ASM Y axis sensor |
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| 5010011 | Power Pack Card |
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| 5020044 | Control Card |
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| 5150004 | Safety Card |
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| 606200 | Position Detector |
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| 630030440 | Signal Distribution |
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| 632 720 220 | MPU Board SATC |
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| 632 720 520 | PCB Host Adaptor |
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| 632 720 520.00 | PCB Host Adaptor |
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| 632 720 530 | PCB Communications ICC S |
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| 632 720 530.00 | PCB Communications ICC S |
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| 632-72010000 | Analog Input Board |
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| 632-72011000 | Video Display Board |
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| 63261017000 | PCB Motor Drive |
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| 63261018000 | PCB Board Power Motor Drive |
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| 632610190 | Finger Drive Board |
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| 63261216000 | PC BD Z + PHI Interface |
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| 63263001000 | Encoder / Operator |
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| 63263012000 | Keyboard Oper. TLC PC |
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| 632630170 | Interface Board Connector |
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| 6326301801 | Mother Board |
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| 63263021000 | Exerciser PC Board TMC |
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| 63263024000 | Keyboard Maint. TM PC |
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| 63263025000 | S.C.L. Connector PC B |
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| 63263027000 | Sensor PCB0 |
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| 632720052 | PCB PECVD ANALOG MICON IT |
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| 632720081 | PCB PECVD MEMORY MICON II |
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| 63272009100 | Analog Output Board |
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| 632720140.00 | Digital in/out board |
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| 632720300 | RAM/ROM Assy SATC |
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| 632720350 | CPU Board TMC |
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| 632720360 | CPU Board 6809 TLC |
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| 632720490 | PC Board MPU ICC |
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| 632720500 | PC Board Memory ICC |
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| 633-430-04000 | PCB PECVD RF CONTROL |
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| 6901125 | VALVE PECVD PNEU ENOM2FF |
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| 800 100 588 | Linear Drive unit/van gelder company |
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| 800-810-770 | GAUGE PECVD PRESSURE 0-2. |
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| 800-904-618 | Module Amplifier BN 6429 |
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| 800-905-295 | FAN PECVD HEAT EXCH |
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| 800-905-400 | Power Supply, PECVD MICON, KHSF172-4X |
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| 800-905-494 | METER PECVD RF 1MA/DC |
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| 800-905-887 | TRIAC PECVD BTX94-400 (80 |
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| 800.400.261 | rail runner |
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| 800.500.294 | Encoder strip |
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| 800.500.571 | Timing belt |
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| 800.500.572 | Timing Belt Bando T5-455 OL |
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| 800.500.573 | Timing Belt Bando T5-780 OB |
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| 800.500.895 | Belt Pirelli T5-185-10 |
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| 800.900.080 | Lamp Holder green |
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| 800.904.262 | Preset (see photo) |
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| 800.904.522 | Reflector 40x180 |
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| 800.904.524 | Fork Shape Sensor |
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| 800.904.619 | Overvoltage Prot BN |
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| 800.904.620 | PC BD Interface BN 2 |
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| 800.904.622 | PCB Comparator BN |
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| 800.904.623 | PC BD Power VA 57 / |
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| 800.904.624 | PC BD Power VA 57 / |
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| 800.904.626 | PCB Preset S57 |
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| 800.904.628 | PC BD Battery Backup |
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| 800.904.906 | Transformer P 282 |
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| 800.904.952 | Key Switch |
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| 800.905.939 | Oil Level Sensor |
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| 800500851 | PAPER ROLL ASM 4PP |
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| 800500873 | O-Ring PECVD door seal |
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| 800500903 | SEAL LPCVD TUBE BANK 2 |
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| 800500944 | O-Ring PECVD Silicone |
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| 800810800 | VALVE PECVD VACUUM |
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| 800905047 | VALVE PECVD CLIPPARD EV3M |
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| 800905421 | Valve throttle 1.27 inch, 32mm |
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| 800905503 | ELBOW PECVD UHF CONNECTOR |
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| 800905949 | SWITCH PRES ATM PECV |
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| 808 007 203 | Floppy Station 3 |
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| 808.008.072 | Main switch |
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| 808.016.006 | Opto-sensor Single |
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| 808.053.003 | Motor+ Gear 60 RPM Dunkermotoren # 88856 01127+88412 01470 |
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| 808.053.004 | Motor Encode gear |
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| 808.053.007 | DUNKERMOTOREN Motor Gear + Tacho |
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| 808078009 | PIN COTTER SS BOAT PEC VD |
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| 900638013 | O-Ring 170.82x6.99 Silicone VLTO Tube, brown |
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| 9030030 | Controller unit PS 84 0034.S from SEMY engineering POT SAPY |
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| 904152-002 | Seal, Square Section 164x4 Silicone (VLTO Tube) |
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| 9406191001 | Pressure switch |
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| 994-905 236 | Video PC Board Incl |
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| 994-905 852 | Video Processor Board |
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| 994.904.853 | Monitor, 15" model DF4000-340A |
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| 994.904.855 | Power Supply |
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| 994.904.856 | Power Supply Xentek Inc Model 2X45-3651 |
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| AFC260100SCCMWF6 | Mass Flow Controller 100sccm WF6 |
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| AFC2601SLMN2 | Mass Flow Controller AFC-260 1SLM N2 |
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| AFC2601SLMN2O2 | Mass flow controller AFC-260 N2/O2 1SLM |
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| AFC2601SLMO2 | Mass Flow Controller AFC-260 1SLM O2 |
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| AFC260200SCCMN2 | Mass Flow Controller 200sccm N2 |
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| AFC260300CCHC1 | Mass Flow controller AFC-260 300CC HC1 |
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| AFC260300SCCMNF3 | Mass Flow Controller 300sccm NF3 |
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| AFC260500SCCMHCL | Mass Flow Controller 500sccm HCL |
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| AFC260500SCCMN2 | Mass Flow Controller AFC-260 VCR 0.2 - 500sccm N2 |
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| AFC260500SCCMNH3 | Mass Flow Controller 500sccm NH3 |
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| AFC260500SCCMSIH4 | Mass Flow Controller AFC-260 VCR 0.2 - 500sccm SiH4 |
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| AFC2605SLMAr | Mass flow Controller model AFC-260 5SLM Ar |
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| AFC2605SLMN2 | Mass Flow Controller 5SLM N2 |
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| AFC26110LH2 | Mass flow Controller AFC-261 10L H2 |
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| AFC26120LHe | Mass Flow Controller AFC-261 20L He |
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| AFC26120SLMAr | Mass flow controller AFC-261 20SLM Ar |
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| BTW45-800R | Thyristor (SCR) BTW45-800R |
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| N0SPVX | Mass Flow Controller 500sccm HC1 |
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| VB 78 C8 | Control valve 1/4 |
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| VB 85 D | Pneumatic Valve PSV (Qualiflow) |
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| VB75D | Isolation Valve CL2 |
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